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Preparation, Characterization and Gas Sensing Performance of Pure SnO2 Thin Films Deposited using Physical Vapour Deposition Technique
Abstract
Nanocrystalline SnO2 thin films were successfully prepared using Physical Vapour Deposition technique and were annealed at 400oC. Structural, morphological, elemental, compositional, optical, and electrical and gas sensing properties were studied using XRD, FESEM, EDXS, UV-Vis Spectrophotometer, DC resistance measurement method respectively. Acetone, Cl2, CO2, Ethanol, H2S and NH3 sensing performance of Nanocrystalline physically vaporized SnO2 thin films were investigated and reported in this paper. The results were systematically tabulated, interpreted and discussed.
Keywords
SnO2 thin film, PVD technique, XRD, FESEM, gas sensor, sensitivity
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This article is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License. This article can be used for non-commercial purposes. Mentioning of the publication source is mandatory while referring this article in any future works.
