Preparation, Characterization and Gas Sensing Performance of Pure SnO2 Thin Films Deposited using Physical Vapour Deposition Technique

K. S. Thakare, S. J. Patil, S. B. Deshmukh, R. Y. Borse, R. R. Ahire

Abstract

Nanocrystalline SnO2 thin films were successfully prepared using Physical Vapour Deposition technique and were annealed at 400oC. Structural, morphological, elemental, compositional, optical, and electrical and gas sensing properties were studied using XRD, FESEM, EDXS, UV-Vis Spectrophotometer, DC resistance measurement method respectively. Acetone, Cl2, CO2, Ethanol, H2S and NH3 sensing performance of Nanocrystalline physically vaporized SnO2 thin films were investigated and reported in this paper. The results were systematically tabulated, interpreted and discussed. 

Keywords

SnO2 thin film, PVD technique, XRD, FESEM, gas sensor, sensitivity

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